Application of flowable oxide ( FOx-12 ) for sub-10 nanometer scale fabrication
Paper in proceedings, 2003

dry etching

Electron beam nanolithography

oxide masks

Author

Piotr Jedrasik

Engineering and Industrial Design, MC2 Process Laboratory

29th Micro- and Nano-Engineering, proceedings

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/7/2017