Application of flowable oxide ( FOx-12 ) for nanometer magnetic particle fabrication.
Journal article, 2002
nanoparticles
Magnetic Force Microscopy
Electron beam lithography
Author
Piotr Jedrasik
Department of Microelectronics and Nanoscience
May Hanson
Department of Physics
Microelectronic Engineering
Vol. 61-62 2002 811-817
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering