Preparation and electrical characterization of silicon structures formed by wafer bonding
Doctoral thesis, 1991
Si-Si interfaces
hydrophobic surface
electro-optical studies
deep electron traps
Author
Stefan Bengtsson
Department of Solid State Electronics
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering
ISBN
91-7032-655-x
Technical report - School of Electrical and Computer Engineering, Chalmers University of Technology, Göteborg, Sweden: 223
Doktorsavhandlingar vid Chalmers tekniska högskola. Ny serie: 832