Wafer Bonding Induced Degradation Of Thermal Silicon Dioxide Layers On Silicon
Journal article, 1995
Author
V. V. Afanasev
Per Ericsson
Department of Solid State Electronics
Stefan Bengtsson
Department of Solid State Electronics
Mats O. Andersson
Department of Solid State Electronics
Applied Physics Letters
Vol. 66 13 1653-1655
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering