Formation of silicon structures by plasma-activated wafer bonding
Journal article, 2000

Author

Petra Amirfeiz

Department of Microelectronics, Solid State Electronics

Stefan Bengtsson

Department of Microelectronics, Solid State Electronics

Mats Bergh

Ezio Zanghellini

Chalmers, Department of Experimental Physics

Lars Börjesson

Chalmers, Applied Physics

Journal Of The Electrochemical Society

Vol. 147 7 2693-2698

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/6/2017