Electrical Methods For Characterizing Directly Bonded Silicon Silicon Interfaces
Journal article, 1991

Author

Stefan Bengtsson

Department of Solid State Electronics

Olof Engström

Department of Solid State Electronics

Japanese Journal Of Applied Physics Part 1-Regular Papers Short Notes & Review Papers

Vol. 30 2 356-361

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/8/2017