Oxide Degradation Of Wafer Bonded Metal-Oxide Semiconductor Capacitors Following Fowler-Nordheim Electron Injection
Journal article, 1992
Author
Stefan Bengtsson
Department of Solid State Electronics
Anders Jauhiainen
Department of Solid State Electronics
Olof Engström
Department of Solid State Electronics
Journal Of The Electrochemical Society
Vol. 139 8 2302-2306
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering