Internal oxidation of low dose separation by implanted oxygen wafers in different oxygen/nitrogen mixtures
Journal article, 1997

Author

Per Ericsson

Department of Solid State Electronics

Stefan Bengtsson

Department of Solid State Electronics

Other publications Research

Applied Physics Letters

Vol. 71 16 2310-2312

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/8/2017

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