Ultraclean Si/Si interface formation by surface preparation and direct bonding in ultrahigh vacuum

Karin Hermansson; Francois Grey; Stefan Bengtsson; Ulf Södervall

Ultraclean Si/Si interface formation by surface preparation and direct bonding in ultrahigh vacuum
Journal article, 1998

Author

Karin Hermansson

Francois Grey

Stefan Bengtsson

Department of Solid State Electronics

Other publications Research

Ulf Södervall

Department of Physics

Other publications Research

Journal Of The Electrochemical Society

Vol. 145 5 1645-1649

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/8/2017

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Ultraclean Si/Si interface formation by surface preparation and direct bonding in ultrahigh vacuum Journal article, 1998