The Effects Of Hf Cleaning Prior To Silicon-Wafer Bonding
Journal article, 1995
Author
Karin Ljungberg
Ylva Backlund
Anders Soderbarg
Mats Bergh
Department of Solid State Electronics
Mats O. Andersson
Department of Solid State Electronics
Stefan Bengtsson
Department of Solid State Electronics
Journal Of The Electrochemical Society
Vol. 142 4 1297-1303
Subject Categories (SSIF 2011)
Other Electrical Engineering, Electronic Engineering, Information Engineering