Plasma assisted room temperature bonding for MST
Journal article, 2001

Author

Anke Weinert

Department of Microelectronics

Petra Amirfeiz

Department of Microelectronics

Stefan Bengtsson

Department of Microelectronics

Other publications Research

Sensors And Actuators A-Physical

Vol. 92 1-3 214-222

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

DOI

10.1016/S0924-4247(01)00579-9

Publication data connected to DOI

More information

Created

10/6/2017

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