Towards Graphene Electrodes for High Performance Acoustic Resonators

Paper in proceeding, 2013

The tunable FBAR is a promising building block for versatile microwave systems. Utilizing graphene electrodes promises higher tunability and frequency. Increased parasitic resistance may hamper the Q-factor of the resonator. This paper reports the initiated study of graphene and contacts at DC and microwave frequencies for optimization of these parameters leading to graphene FBARs.