Formation of silicon structures by plasma activated wafer bonding
Paper in proceedings, 2001


Petra Amirfeiz

Department of Microelectronics

Stefan Bengtsson

Department of Microelectronics

Mats Bergh

Department of Microelectronics

Ezio Zanghellini

Department of Physics

Lars Börjesson

Chalmers, Applied Physics

Semiconductor Wafer Bonding: Science, Technology, And Applications V, Proceedings

Vol. 99 29-39

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

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