Depleted semi-insulating silicon/silicon material formed by wafer bonding
Paper in proceeding, 2001
Author
Mikael Johansson
Department of Microelectronics
Stefan Bengtsson
Department of Microelectronics
Published in
Semiconductor Wafer Bonding: Science, Technology, And Applications V, Proceedings
Vol. 99 p. 420-428
Categorizing
Subject Categories (SSIF 2011)
Other Electrical Engineering, Electronic Engineering, Information Engineering