Fabrication of large dimension aluminum air-bridges for superconducting quantum circuits
Journal article, 2013

Proper grounding between different ground planes in coplanar superconducting qubit circuits is important to avoid spurious resonances which increase decoherence. Here, the authors present a possible solution to suppress such undesired modes using superconducting aluminum air-bridges which have been fabricated on top of aluminum coplanar waveguide transmission lines. 3D electromagnetic simulations were done to guide the design of the air-bridges such that the input reflection (S11) of the bridges was kept at a minimum level. A fabrication method based on optical lithography techniques was developed and it resulted in air-bridges with a height of approximately 10 μm and lengths of up to 500 μm. The method can be generalized to arbitrary length air-bridge with heights even exceeding 15 μm.

Author

Mohammad Abuwasib

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Philip Krantz

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Per Delsing

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics

2166-2754 (ISSN)

Vol. 31 3 031601-

Areas of Advance

Nanoscience and Nanotechnology

Subject Categories

Nano Technology

Condensed Matter Physics

DOI

10.1116/1.4798399

More information

Created

10/8/2017