Fabrication of large dimension aluminum air-bridges for superconducting quantum circuits
Journal article, 2013
Author
Mohammad Abuwasib
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics
Philip Krantz
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics
Per Delsing
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics
Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
21662746 (ISSN) 21662754 (eISSN)
Vol. 31 3 031601- 031601Areas of Advance
Nanoscience and Nanotechnology
Subject Categories
Nano Technology
Condensed Matter Physics
DOI
10.1116/1.4798399