Fabrication of large dimension aluminum air-bridges for superconducting quantum circuits
Artikel i vetenskaplig tidskrift, 2013

Proper grounding between different ground planes in coplanar superconducting qubit circuits is important to avoid spurious resonances which increase decoherence. Here, the authors present a possible solution to suppress such undesired modes using superconducting aluminum air-bridges which have been fabricated on top of aluminum coplanar waveguide transmission lines. 3D electromagnetic simulations were done to guide the design of the air-bridges such that the input reflection (S11) of the bridges was kept at a minimum level. A fabrication method based on optical lithography techniques was developed and it resulted in air-bridges with a height of approximately 10 μm and lengths of up to 500 μm. The method can be generalized to arbitrary length air-bridge with heights even exceeding 15 μm.

Författare

Mohammad Abuwasib

Chalmers, Mikroteknologi och nanovetenskap (MC2), Kvantkomponentfysik

Philip Krantz

Chalmers, Mikroteknologi och nanovetenskap (MC2), Kvantkomponentfysik

Per Delsing

Chalmers, Mikroteknologi och nanovetenskap (MC2), Kvantkomponentfysik

Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics

2166-2754 (ISSN)

Vol. 31 3 031601-

Styrkeområden

Nanovetenskap och nanoteknik

Ämneskategorier

Nanoteknik

Den kondenserade materiens fysik

DOI

10.1116/1.4798399