Charge carrier injection into the buried oxide of wafer bonded silicon-on-insulator materials
Journal article, 1994
Author
Stefan Bengtsson
Department of Solid State Electronics
Per Ericsson
Department of Solid State Electronics
K Mitani
Takao Abe
Proc. 6th International Symposium on Silicon-On-Insulator Technology and Devices. The Electrochemical Society.
Vol. 94 11 245-
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering