Microroughness characterisation using 2D fourier transform of AFM images
Journal article, 1994
Author
Mats Bergh
Department of Solid State Electronics
Mats O. Andersson
Department of Solid State Electronics
Stefan Bengtsson
Department of Solid State Electronics
Proc. 25th IEEE Semiconductor Interface Specialists Conference. IEEE.
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering