Formation of directly bonded Si/Si interfaces in ultra-high vacuum
Paper in proceeding, 1997
Author
Karin Ljungberg
Francois Grey
Stefan Bengtsson
Department of Solid State Electronics
Published in
Proc 2nd International Symposium on Control of Semiconductor Interfaces. North-Holland.
p. 813-
Categorizing
Subject Categories (SSIF 2011)
Other Electrical Engineering, Electronic Engineering, Information Engineering