A Si/SiO2/Si heterostructure barrier varactor diode made by wafer bonding
Journal article, 2001
Author
Stefan Bengtsson
Department of Microelectronics
Proc. 6th International Symposium on Semiconductor Wafer Bonding. The Electrochemical Society.
Vol. 2001 27 205-
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering