Sensitivity Analysis of TRL Calibration in Waveguide Integrated Membrane Circuits
Journal article, 2013
We present a sensitivity analysis on TRL calibrated S-parameter measurements of membrane circuits in the WR-03 waveguide band (220-325 GHz). The impact of waveguide and membrane circuit misalignment, as well as waveguide dimension mismatch is investigated. The analysis is performed for the thru-reflect-line (TRL) calibration applied to E-plane split waveguide blocks carrying membrane circuits. The analysis shows a large influence of the waveguide width tolerance on transmission and reflection phase after the TRL calibration. For a 20 mm long rectangular waveguide with a ± 5 μm width tolerance a phase uncertainty as large as ± 45° for reflection and ± 30° for transmission measurements is observed.
measurements
submillimeter wave
scattering parameters
monolithic integrated circuits (MICs)
TRL
membrane
vector network analyzer (VNA)
sensitivity analysis
Calibration
terahertz (THz)
Author
Jörgen Stenarson
Thi Ngoc Do Thanh
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
Huan Zhao Ternehäll
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
GigaHertz Centre
Peter Sobis
Aik-Yean Tang
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
GigaHertz Centre
Klas Yhland
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
GigaHertz Centre
Jan Stake
GigaHertz Centre
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
IEEE Transactions on Terahertz Science and Technology
2156-342X (ISSN) 21563446 (eISSN)
Vol. 3 5 558-565 6585798Areas of Advance
Information and Communication Technology
Infrastructure
Nanofabrication Laboratory
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1109/TTHZ.2013.2274371