Process optimization for SiGe pMOSFETs using low temperature oxides on ultra-thin cap layers
Paper in proceeding, 2004
Author
Mikael Johansson
Chalmers
M. Y. A. Yousif
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Per Lundgren
Chalmers, Microtechnology and Nanoscience (MC2)
Stefan Bengtsson
Chalmers, Microtechnology and Nanoscience (MC2)
Published in
Physica scripta. Topical Issues
0281-1847 (ISSN)
Vol. T114 p. 97-99Categorizing
Subject Categories (SSIF 2011)
Materials Engineering
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
DOI
10.1088/0031-8949/2004/T114/024