SU8 ridge-gap waveguide resonator
Paper in proceeding, 2014

In this paper, we present the first ridge-gap waveguide resonator made with a polymer base. It is designed for the frequency range 220-325 GHz, and is fabricated solely using a Au coated two-layer SU8-based process. The design is based on previous work done with Si. The new process has advantages such as fewer and cheaper process steps. The SU8 ridge-gap waveguide resonator is made in order to obtain attenuation characteristics via the measured Q-factor of the resonator. The ridge-gap waveguide resonator has the same dimensions as the previous one fabricated in Si, and the same thickness of the Au coating. The SU8-based resonator shows an attenuation loss of 0.41 dB/mm at 282.2 GHz compared to the Si-based resonator with an attenuation loss of 0.043 dB/mm at 283.5 GHz. This makes the SU8 process a more cost-effective alternative to the Si process

New and emerging technologies and materials



Sofia Rahiminejad

Chalmers, Applied Physics, Electronics Material and Systems

Elena Pucci

Chalmers, Signals and Systems, Communication, Antennas and Optical Networks

S. Haasl

Royal Institute of Technology (KTH)

Peter Enoksson

Chalmers, Applied Physics, Electronics Material and Systems

International Journal of Microwave and Wireless Technologies

1759-0787 (ISSN)

Vol. 6 5 459-465

MEMSWAVE Symposium 2013
Potsdam, Germany,

Areas of Advance

Information and Communication Technology


Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering


Nanofabrication Laboratory



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