SU8 ridge-gap waveguide resonator
Artikel i vetenskaplig tidskrift, 2014

In this paper, we present the first ridge-gap waveguide resonator made with a polymer base. It is designed for the frequency range 220-325 GHz, and is fabricated solely using a Au coated two-layer SU8-based process. The design is based on previous work done with Si. The new process has advantages such as fewer and cheaper process steps. The SU8 ridge-gap waveguide resonator is made in order to obtain attenuation characteristics via the measured Q-factor of the resonator. The ridge-gap waveguide resonator has the same dimensions as the previous one fabricated in Si, and the same thickness of the Au coating. The SU8-based resonator shows an attenuation loss of 0.41 dB/mm at 282.2 GHz compared to the Si-based resonator with an attenuation loss of 0.043 dB/mm at 283.5 GHz. This makes the SU8 process a more cost-effective alternative to the Si process

RF-MEMS and MOEMS

New and emerging technologies and materials

Författare

Sofia Rahiminejad

Chalmers, Teknisk fysik, Elektronikmaterial och system

Elena Pucci

Chalmers, Signaler och system, Kommunikations- och antennsystem, Antennsystem

S. Haasl

Kungliga Tekniska Högskolan (KTH)

Peter Enoksson

Chalmers, Teknisk fysik, Elektronikmaterial och system

International Journal of Microwave and Wireless Technologies

1759-0787 (ISSN)

Vol. 6 5 459-465

Styrkeområden

Informations- och kommunikationsteknik

Produktion

Ämneskategorier

Elektroteknik och elektronik

Infrastruktur

Nanotekniklaboratoriet

DOI

10.1017/s1759078714000609

Mer information

Senast uppdaterat

2018-02-26