Study of NbN Ultra-thin Films for THz Hot-electron Bolometers
Paper in proceeding, 2014
Hot-electron bolometer (HEB) mixers based on
superconducting ultra-thin NbN films are largely used for THz spectroscopy for space and ground-based observations. Performance of the HEB mixers directly depends on the details of the structure and composition of thin film surface, as well as the nitrogen composition and its depth distribution. In this work, we present the study of the composition and the surface oxidation state of NbN films grown at two different temperatures and of 5 and 10 nm thickness.
thin films
Hot-electron bolometers
surface analysis
NbN
Author
Victor P. Afanas'ev
Sascha Krause
Chalmers, Earth and Space Sciences, Advanced Receiver Development
Alexander V. Lubenchenko
Alexander A. Batrakov
Vincent Desmaris
Chalmers, Earth and Space Sciences, Advanced Receiver Development
Alexey Pavolotskiy
Chalmers, Earth and Space Sciences, Advanced Receiver Development
Victor Belitsky
Chalmers, Earth and Space Sciences, Advanced Receiver Development
25th International Sympsoium on Space Terahertz Technology, ISSTT 2014; Moscow; Russian Federation; 27 April 2014 through 30 April 2014
141-143
Subject Categories
Manufacturing, Surface and Joining Technology
Other Engineering and Technologies not elsewhere specified
Condensed Matter Physics
Infrastructure
Onsala Space Observatory
Nanofabrication Laboratory