CMOS compatible on-chip decoupling capacitor based on vertically aligned carbon nanofibers
Journal article, 2015
Low temperature
Carbon nanofibers
Decoupling capacitor
CMOS
Author
Muhammad Amin
Chalmers, Applied Physics, Electronics Material and Systems
Gert Göransson
University of Gothenburg
Vincent Desmaris
Smoltek AB
Peter Enoksson
Chalmers, Applied Physics, Electronics Material and Systems
Solid-State Electronics
0038-1101 (ISSN)
Vol. 107 15-19Areas of Advance
Nanoscience and Nanotechnology
Transport
Production
Energy
Materials Science
Subject Categories
Manufacturing, Surface and Joining Technology
Nano Technology
Driving Forces
Innovation and entrepreneurship
Infrastructure
Nanofabrication Laboratory
DOI
10.1016/j.sse.2015.01.022