Kinetic inductance as a microwave circuit design variable by multilayer fabrication
Journal article, 2015

We report on the development of a reliable NbN/Al/Nb/NbN multilayer fabrication technique for combining design elements with and without kinetic inductance in superconducting microwave circuits. As a proof-of-concept we demonstrate the application of the proposed technique to build a slow microwave propagation line matched to 50 Ω terminals. Fabrication details along with the design and measurements are discussed. At 8 GHz the presented device operates as a dc controllable full-turn phase shifter. We suggest that by exploiting the kinetic inductance as a design variable one can greatly improve operation parameters for a variety of standard microwave designs such as step-impedance filters and resonators.

microfabrication

microwave engineering

superconducting circuit

kinetic inductance

Author

Astghik Adamyan

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Sebastian Erik de Graaf

National Physical Laboratory (NPL)

Sergey Kubatkin

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Andrey Danilov

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Superconductor Science and Technology

0953-2048 (ISSN) 1361-6668 (eISSN)

Vol. 28 8

Subject Categories

Atom and Molecular Physics and Optics

DOI

10.1088/0953-2048/28/8/085007

More information

Latest update

5/29/2018