Kinetic inductance as a microwave circuit design variable by multilayer fabrication
Artikel i vetenskaplig tidskrift, 2015

We report on the development of a reliable NbN/Al/Nb/NbN multilayer fabrication technique for combining design elements with and without kinetic inductance in superconducting microwave circuits. As a proof-of-concept we demonstrate the application of the proposed technique to build a slow microwave propagation line matched to 50 Ω terminals. Fabrication details along with the design and measurements are discussed. At 8 GHz the presented device operates as a dc controllable full-turn phase shifter. We suggest that by exploiting the kinetic inductance as a design variable one can greatly improve operation parameters for a variety of standard microwave designs such as step-impedance filters and resonators.

microfabrication

microwave engineering

superconducting circuit

kinetic inductance

Författare

Astghik Adamyan

Chalmers, Mikroteknologi och nanovetenskap (MC2), Kvantkomponentfysik

Sebastian Erik de Graaf

National Physical Laboratory (NPL)

Sergey Kubatkin

Chalmers, Mikroteknologi och nanovetenskap (MC2), Kvantkomponentfysik

Andrey Danilov

Chalmers, Mikroteknologi och nanovetenskap (MC2), Kvantkomponentfysik

Superconductor Science and Technology

0953-2048 (ISSN) 1361-6668 (eISSN)

Vol. 28 8

Ämneskategorier

Atom- och molekylfysik och optik

DOI

10.1088/0953-2048/28/8/085007

Mer information

Senast uppdaterat

2018-05-29