TiO2 membrane high-contrast grating reflectors for vertical-cavity light-emitters in the visible wavelength regime
Journal article, 2015

© 2015 American Vacuum Society. In this work, the authors describe a novel route to achieve a high reflectivity, wide bandwidth feedback mirror for GaN-based vertical-cavity light emitters; using air-suspended high contrast gratings in TiO 2 , with SiO 2 as a sacrificial layer. The TiO 2 film deposition and the etching processes are developed to yield grating bars without bending, and with near-ideal rectangular cross-sections. Measured optical reflectivity spectra of the fabricated high contrast gratings show very good agreement with simulations, with a high reflectivity of >95% over a 25 nm wavelength span centered around 435 nm for the transverse-magnetic polarization.

Author

Seyed Ehsan Hashemi

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Jörgen Bengtsson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Johan Gustavsson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

STEFAN CARLSSON

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Georg Rossbach

Ecole Polytechnique Federale De Lausanne

Åsa Haglund

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics

2166-2754 (ISSN)

Vol. 33 5

Areas of Advance

Nanoscience and Nanotechnology (2010-2017)

Subject Categories

Telecommunications

Nano Technology

Infrastructure

Nanofabrication Laboratory

DOI

10.1116/1.4929416

More information

Latest update

5/3/2018 1