TiO2 membrane high-contrast grating reflectors for vertical-cavity light-emitters in the visible wavelength regime
Artikel i vetenskaplig tidskrift, 2015

© 2015 American Vacuum Society. In this work, the authors describe a novel route to achieve a high reflectivity, wide bandwidth feedback mirror for GaN-based vertical-cavity light emitters; using air-suspended high contrast gratings in TiO 2 , with SiO 2 as a sacrificial layer. The TiO 2 film deposition and the etching processes are developed to yield grating bars without bending, and with near-ideal rectangular cross-sections. Measured optical reflectivity spectra of the fabricated high contrast gratings show very good agreement with simulations, with a high reflectivity of >95% over a 25 nm wavelength span centered around 435 nm for the transverse-magnetic polarization.

Författare

Seyed Ehsan Hashemi

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

Jörgen Bengtsson

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

Johan Gustavsson

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

STEFAN CARLSSON

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

Georg Rossbach

Ecole Polytechnique Federale De Lausanne

Åsa Haglund

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics

2166-2754 (ISSN)

Vol. 33

Styrkeområden

Nanovetenskap och nanoteknik

Ämneskategorier

Telekommunikation

Nanoteknik

Infrastruktur

Nanotekniklaboratoriet

DOI

10.1116/1.4929416