A hybrid-type CVD system for graphene growth
Journal article, 2015
Pyrolysis
Nucleation density
Graphene
Cold-wall
Author
Grigory Skoblin
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics
Niclas Lindvall
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics
Jie Sun
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics
Avgust Yurgens
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics
Chemical Vapor Deposition
0948-1907 (ISSN) 1521-3862 (eISSN)
Vol. 21 7-9 176-180Areas of Advance
Nanoscience and Nanotechnology
Subject Categories
Nano Technology
Infrastructure
Nanofabrication Laboratory
DOI
10.1002/cvde.201507163