A hybrid-type CVD system for graphene growth
Journal article, 2015

A cold-wall CVD system for graphene growth on metal foils is converted to an effectively hot-wall one by merely adding another heater, sandwiching the foil in between the heaters. This simple design demonstrates both an improved temperature uniformity characteristic for hot-wall systems, and a high responsivity distinctive for cold-wall ones. This beneficial combination allows for a much better control of graphene growth kinetics. An effectively hot-wall system for graphene growth is made from a cold-wall one by encapsulating the metal foil in between two heaters. This simple conversion demonstrates improved temperature control and high temperature ramping rate. It also allows reaching lower nucleation density and provides better control of growth kinetics.

Pyrolysis

Nucleation density

Graphene

Cold-wall

Author

Grigory Skoblin

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Niclas Lindvall

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Jie Sun

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Avgust Yurgens

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Chemical Vapor Deposition

0948-1907 (ISSN) 1521-3862 (eISSN)

Vol. 21 7-9 176-180

Areas of Advance

Nanoscience and Nanotechnology (2010-2017)

Subject Categories

Nano Technology

Infrastructure

Nanofabrication Laboratory

DOI

10.1002/cvde.201507163

More information

Created

10/7/2017