Self-organized nanostructuring in Zr0.69Al0.31N thin films studied by atom probe tomography
Journal article, 2016
Magnetron sputtering
Atom probe tomography
Zirconium aluminum nitride
Self-organized structures
Nanostructures
Hard coatings
Author
L. J. S. Johnson
Linköping University
N. Ghafoor
Linköping University
D. Engberg
Linköping University
Mattias Thuvander
Chalmers, Physics, Materials Microstructure
Krystyna Marta Stiller
Chalmers, Physics, Materials Microstructure
M. Oden
Linköping University
L. Hultman
Linköping University
Thin Solid Films
0040-6090 (ISSN)
Vol. 615 233-238Subject Categories
Other Engineering and Technologies
DOI
10.1016/j.tsf.2016.07.034