Fabrication and characterization of reactively sputtered TaN thin film resistors for millimeter wave applications
Journal article, 2004
electrical resistivity
tantalum compounds
S-parameters
microstrip lines
MIMIC
thin film resistors
sputter deposition
Author
Anders Mellberg
Chalmers, Microtechnology and Nanoscience (MC2)
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Samuel P. Nicols
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Chalmers, Microtechnology and Nanoscience (MC2)
Niklas Rorsman
Chalmers, Microtechnology and Nanoscience (MC2)
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Herbert Zirath
Chalmers, Microtechnology and Nanoscience (MC2)
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Electrochemical and Solid State Letters
Vol. 7 11 G261-3
Subject Categories
Materials Engineering
Electrical Engineering, Electronic Engineering, Information Engineering