MgB2 thin film by HPCVD for THz HEB mixers fabrication
Conference poster, 2016

In this presentation we discuss the in-house custom built HPCVD system for MgB2 thin film deposition: construction and the deposition process development and optimization. The process was optimized aiming to achieve the ultra-thin films with a Tc in the order of bulk value keeping them homogenous and smooth. The inhomogeneity and high roughness of films can significantly affect the HEB mixers performance if they are scaling down to submicron dimensions, e.g. by reduction of Tc or increase of device resistance and consequently mismatch with antenna. The film parameters (such as critical temperature, sheet resistance, critical current density) of obtained films were measured; morphology (AFM), structure (XRD) of the films were also analysed concerning HEB mixer performance.

Author

Evgenii Novoselov

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Serguei Cherednichenko

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Materials for Tomorrow November 8-10, 2016, Göteborg, Sweden

Areas of Advance

Nanoscience and Nanotechnology (2010-2017)

Materials Science

Subject Categories

Materials Engineering

Nano Technology

Condensed Matter Physics

Infrastructure

Nanofabrication Laboratory

More information

Created

10/8/2017