MgB2 thin film by HPCVD for THz HEB mixers fabrication
Poster (konferens), 2016
In this presentation we discuss the in-house custom built HPCVD system for MgB2 thin film deposition: construction and the deposition process development and optimization. The process was optimized aiming to achieve the ultra-thin films with a Tc in the order of bulk value keeping them homogenous and smooth. The inhomogeneity and high roughness of films can significantly affect the HEB mixers performance if they are scaling down to submicron dimensions, e.g. by reduction of Tc or increase of device resistance and consequently mismatch with antenna. The film parameters (such as critical temperature, sheet resistance, critical current density) of obtained films were measured; morphology (AFM), structure (XRD) of the films were also analysed concerning HEB mixer performance.