Rapid manufacturing of OSTE polymer RF-MEMS components
Paper in proceedings, 2017

This paper reports the first RF-MEMS component in OSTE polymer. Three OSTE-based ridge gap resonators were fabricated by direct, high aspect ratio, photostructuring. The OSTE polymer's good adhesion to gold makes it suitable for RF-MEMS applications. The OSTE ridge gap resonators differ in how they were coated with gold. The OSTE-based devices are compared to each other as well as to Si-based, SU8-based, and CNT-based devices of equal design. The OSTE-based process was performed outside the cleanroom, and with a fast fabrication process (∼1 h). The OSTE-based device performance is on par with that of the other alternatives in terms of frequency, attenuation, and Q-factor. © 2017 IEEE.

Author

Sofia Rahiminejad

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Other publications Research

J. Hansson

Royal Institute of Technology (KTH)

Mercene Labs AB

Elof Köhler

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Other publications Research

W. van der Wijngaart

Royal Institute of Technology (KTH)

T. Haraldsson

Royal Institute of Technology (KTH)

Mercene Labs AB

Sjoerd Haasl

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Other publications Research

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Other publications Research

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

10846999 (ISSN)

901-904 7863554

Areas of Advance

Information and Communication Technology

Nanoscience and Nanotechnology (2010-2017)

Transport

Production

Materials Science

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

Infrastructure

Nanofabrication Laboratory

DOI

10.1109/MEMSYS.2017.7863554

Publication data connected to DOI

ISBN

9781509050789

More information

Latest update

9/21/2018

Feedback and support

If you have questions, need help, find a bug or just want to give us feedback you may use this form, or contact us per e-mail research.lib@chalmers.se or by phone 46 (0)31-772 3744.

About

Research.chalmers.se contains research information from Chalmers University of Technology, Sweden. It includes information on projects, publications, research funders and collaborations.

More about coverage period and what is publicly available

Privacy and cookies

Links

Chalmers Library
Chalmers Research
Research projects at chalmers.se

Chalmers University of Technology

SE-412 96 GOTHENBURG, SWEDEN
PHONE: +46 (0)31-772 10 00
WWW.CHALMERS.SE