Rapid manufacturing of OSTE polymer RF-MEMS components
Paper in proceedings, 2017
This paper reports the first RF-MEMS component in OSTE polymer. Three OSTE-based ridge gap resonators were fabricated by direct, high aspect ratio, photostructuring. The OSTE polymer's good adhesion to gold makes it suitable for RF-MEMS applications. The OSTE ridge gap resonators differ in how they were coated with gold. The OSTE-based devices are compared to each other as well as to Si-based, SU8-based, and CNT-based devices of equal design. The OSTE-based process was performed outside the cleanroom, and with a fast fabrication process (∼1 h). The OSTE-based device performance is on par with that of the other alternatives in terms of frequency, attenuation, and Q-factor. © 2017 IEEE.
Author
Sofia Rahiminejad
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
J. Hansson
Royal Institute of Technology (KTH)
Mercene Labs AB
Elof Köhler
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
W. van der Wijngaart
Royal Institute of Technology (KTH)
T. Haraldsson
Royal Institute of Technology (KTH)
Mercene Labs AB
Sjoerd Haasl
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
10846999 (ISSN)
901-904 7863554Areas of Advance
Information and Communication Technology
Nanoscience and Nanotechnology (2010-2017)
Transport
Production
Materials Science
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering
Infrastructure
Nanofabrication Laboratory
DOI
10.1109/MEMSYS.2017.7863554
ISBN
9781509050789