Rapid manufacturing of OSTE polymer RF-MEMS components
Paper in proceedings, 2017
Author
Sofia Rahiminejad
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
J. Hansson
Royal Institute of Technology (KTH)
Mercene Labs AB
Elof Köhler
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
W. van der Wijngaart
Royal Institute of Technology (KTH)
T. Haraldsson
Royal Institute of Technology (KTH)
Mercene Labs AB
Sjoerd Haasl
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
10846999 (ISSN)
901-904 7863554Areas of Advance
Information and Communication Technology
Nanoscience and Nanotechnology (2010-2017)
Transport
Production
Materials Science
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering
Infrastructure
Nanofabrication Laboratory
DOI
10.1109/MEMSYS.2017.7863554
ISBN
9781509050789