Rapid manufacturing of OSTE polymer RF-MEMS components
Paper in proceedings, 2017

This paper reports the first RF-MEMS component in OSTE polymer. Three OSTE-based ridge gap resonators were fabricated by direct, high aspect ratio, photostructuring. The OSTE polymer's good adhesion to gold makes it suitable for RF-MEMS applications. The OSTE ridge gap resonators differ in how they were coated with gold. The OSTE-based devices are compared to each other as well as to Si-based, SU8-based, and CNT-based devices of equal design. The OSTE-based process was performed outside the cleanroom, and with a fast fabrication process (∼1 h). The OSTE-based device performance is on par with that of the other alternatives in terms of frequency, attenuation, and Q-factor. © 2017 IEEE.

Author

Sofia Rahiminejad

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

J. Hansson

Royal Institute of Technology (KTH)

Mercene Labs AB

Elof Köhler

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

W. van der Wijngaart

Royal Institute of Technology (KTH)

T. Haraldsson

Royal Institute of Technology (KTH)

Mercene Labs AB

Sjoerd Haasl

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

10846999 (ISSN)

901-904 7863554

Areas of Advance

Information and Communication Technology

Nanoscience and Nanotechnology (2010-2017)

Transport

Production

Materials Science

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

Infrastructure

Nanofabrication Laboratory

DOI

10.1109/MEMSYS.2017.7863554

ISBN

9781509050789

More information

Latest update

9/21/2018