Rapid manufacturing of OSTE polymer RF-MEMS components
Paper i proceeding, 2017
This paper reports the first RF-MEMS component in OSTE polymer. Three OSTE-based ridge gap resonators were fabricated by direct, high aspect ratio, photostructuring. The OSTE polymer's good adhesion to gold makes it suitable for RF-MEMS applications. The OSTE ridge gap resonators differ in how they were coated with gold. The OSTE-based devices are compared to each other as well as to Si-based, SU8-based, and CNT-based devices of equal design. The OSTE-based process was performed outside the cleanroom, and with a fast fabrication process (∼1 h). The OSTE-based device performance is on par with that of the other alternatives in terms of frequency, attenuation, and Q-factor. © 2017 IEEE.
Författare
Sofia Rahiminejad
Chalmers, Mikroteknologi och nanovetenskap, Elektronikmaterial
J. Hansson
Kungliga Tekniska Högskolan (KTH)
Mercene Labs AB
Elof Köhler
Chalmers, Mikroteknologi och nanovetenskap, Elektronikmaterial
W. van der Wijngaart
Kungliga Tekniska Högskolan (KTH)
T. Haraldsson
Kungliga Tekniska Högskolan (KTH)
Mercene Labs AB
Sjoerd Haasl
Chalmers, Mikroteknologi och nanovetenskap, Elektronikmaterial
Peter Enoksson
Chalmers, Mikroteknologi och nanovetenskap, Elektronikmaterial
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
10846999 (ISSN)
901-904 78635549781509050789 (ISBN)
Styrkeområden
Informations- och kommunikationsteknik
Nanovetenskap och nanoteknik
Transport
Produktion
Materialvetenskap
Ämneskategorier (SSIF 2011)
Elektroteknik och elektronik
Infrastruktur
Nanotekniklaboratoriet
DOI
10.1109/MEMSYS.2017.7863554
ISBN
9781509050789