Rapid manufacturing of OSTE polymer RF-MEMS components
Paper i proceeding, 2017

This paper reports the first RF-MEMS component in OSTE polymer. Three OSTE-based ridge gap resonators were fabricated by direct, high aspect ratio, photostructuring. The OSTE polymer's good adhesion to gold makes it suitable for RF-MEMS applications. The OSTE ridge gap resonators differ in how they were coated with gold. The OSTE-based devices are compared to each other as well as to Si-based, SU8-based, and CNT-based devices of equal design. The OSTE-based process was performed outside the cleanroom, and with a fast fabrication process (∼1 h). The OSTE-based device performance is on par with that of the other alternatives in terms of frequency, attenuation, and Q-factor. © 2017 IEEE.

Författare

Sofia Rahiminejad

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

J. Hansson

Kungliga Tekniska Högskolan (KTH)

Mercene Labs AB

Elof Köhler

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

W. van der Wijngaart

Kungliga Tekniska Högskolan (KTH)

T. Haraldsson

Kungliga Tekniska Högskolan (KTH)

Mercene Labs AB

Sjoerd Haasl

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

Peter Enoksson

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

10846999 (ISSN)

901-904 7863554

Styrkeområden

Informations- och kommunikationsteknik

Nanovetenskap och nanoteknik

Transport

Produktion

Materialvetenskap

Ämneskategorier

Elektroteknik och elektronik

Infrastruktur

Nanotekniklaboratoriet

DOI

10.1109/MEMSYS.2017.7863554

ISBN

9781509050789

Mer information

Senast uppdaterat

2018-09-21