Transmission electron microscopy assessment of the Si enhancement of Ti/Al/Ni/Au Ohmic contacts to undoped AlGaN/GaN heterostructures
Journal article, 2006
Author
Vincent Desmaris
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Jin-Yu Shiu
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Chung-Lu Lu
Niklas Rorsman
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Herbert Zirath
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Edward-Yi Chang
Journal of Applied Physics
Vol. 100 3 34904-1-4-
Subject Categories
Other Materials Engineering
Other Electrical Engineering, Electronic Engineering, Information Engineering