Room temperature plasticity in thermally grown sub-micron oxide scales revealed by micro-cantilever bending
Journal article, 2018

We propose a new geometry for focused ion beam milled micro-cantilevers, which allows production of residual stress-free, isolated thin film specimens from film-substrate systems. This geometry was used to demonstrate the presence of permanent deformation in about 200 nm thick thermally grown oxide scales on a Ni-base superalloy, after applying large bending displacements in-situ in a scanning electron microscope. Stiffness measurements performed before and after the bending tests confirmed the absence of micro-cracks, leading to the conclusion that plastic deformation occurred in the oxide scale. The proposed method is extendable to other film-substrate systems and testing conditions, like non-ambient temperatures.

Crystalline oxides

Plastic deformation

Focused ion beam (FIB)

Scanning electron microscopy (SEM)

Micro-mechanical testing


Anand Harihara Subramonia Iyer

Chalmers, Physics, Materials Microstructure

Krystyna Marta Stiller

Chalmers, Physics, Materials Microstructure

Magnus Hörnqvist Colliander

Chalmers, Physics, Materials Microstructure

Scripta Materialia

1359-6462 (ISSN)

Vol. 144 9-12

Subject Categories

Materials Engineering

Other Engineering and Technologies

Metallurgy and Metallic Materials


Chalmers Materials Analysis Laboratory

Areas of Advance

Materials Science



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