Room temperature plasticity in thermally grown sub-micron oxide scales revealed by micro-cantilever bending
Journal article, 2018

We propose a new geometry for focused ion beam milled micro-cantilevers, which allows production of residual stress-free, isolated thin film specimens from film-substrate systems. This geometry was used to demonstrate the presence of permanent deformation in about 200 nm thick thermally grown oxide scales on a Ni-base superalloy, after applying large bending displacements in-situ in a scanning electron microscope. Stiffness measurements performed before and after the bending tests confirmed the absence of micro-cracks, leading to the conclusion that plastic deformation occurred in the oxide scale. The proposed method is extendable to other film-substrate systems and testing conditions, like non-ambient temperatures.

Crystalline oxides

Micro-mechanical testing

Plastic deformation

Focused ion beam (FIB)

Scanning electron microscopy (SEM)


Anand Harihara Subramonia Iyer

Chalmers, Physics, Materials Microstructure

Krystyna Marta Stiller

Chalmers, Physics, Materials Microstructure

Magnus Hörnqvist Colliander

Chalmers, Physics, Materials Microstructure

Scripta Materialia

1359-6462 (ISSN)

Vol. 144 9-12

In-situ micromechanical testing of interfaces for multiscale modeling of fracture

Swedish Research Council (VR) (2015-04719), 2016-01-01 -- 2019-12-31.

Subject Categories

Materials Engineering

Applied Mechanics


Metallurgy and Metallic Materials


Chalmers Materials Analysis Laboratory

Areas of Advance

Materials Science



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