Room temperature plasticity in thermally grown sub-micron oxide scales revealed by micro-cantilever bending
Artikel i vetenskaplig tidskrift, 2018

We propose a new geometry for focused ion beam milled micro-cantilevers, which allows production of residual stress-free, isolated thin film specimens from film-substrate systems. This geometry was used to demonstrate the presence of permanent deformation in about 200 nm thick thermally grown oxide scales on a Ni-base superalloy, after applying large bending displacements in-situ in a scanning electron microscope. Stiffness measurements performed before and after the bending tests confirmed the absence of micro-cracks, leading to the conclusion that plastic deformation occurred in the oxide scale. The proposed method is extendable to other film-substrate systems and testing conditions, like non-ambient temperatures.

Plastic deformation

Focused ion beam (FIB)

Micro-mechanical testing

Scanning electron microscopy (SEM)

Crystalline oxides


Anand Harihara Subramonia Iyer

Chalmers, Fysik, Biologisk fysik

Krystyna Marta Stiller

Chalmers, Fysik, Biologisk fysik

Magnus Hörnqvist Colliander

Chalmers, Fysik, Biologisk fysik

Scripta Materialia

1359-6462 (ISSN)

Vol. 144 9-12



Annan teknik

Metallurgi och metalliska material


Chalmers materialanalyslaboratorium