Resonant mass loading calibration method for nanoindentor force sensor
Paper in proceeding, 2006

MEMS

Force calibration

third harmonic method

Author

Alexandra Nafari

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Other publications Research

Eurosensors XX 2006

Subject Categories

Control Engineering

More information

Created

10/7/2017

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