In situ TEM nanoindentation using a MEMS force sensor
Paper in proceeding, 2006
in situ TEM
nanoindentation
MEMS
Author
Alexandra Nafari
Magnus Larsson
Andrey Danilov
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics
Håkan Olin
Krister Svensson
Chalmers, Applied Physics, Microscopy and Microanalysis
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
International Microscopy Congress 16, 2006
Subject Categories
Control Engineering