In situ TEM nanoindentation using a MEMS force sensor
Paper in proceedings, 2006

in situ TEM

nanoindentation

MEMS

Author

Alexandra Nafari

Magnus Larsson

Andrey Danilov

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Håkan Olin

Krister Svensson

Chalmers, Applied Physics, Microscopy and Microanalysis

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

International Microscopy Congress 16, 2006

Subject Categories

Control Engineering

More information

Created

10/7/2017