Broadband microprobe characterization of the ferroelectric films and varactors
Paper in proceeding, 2006
A simple method for the assessment of layout parasitics in the on-wafer microprobe characterization of the ferroelectric films and varactors is presented. The proposed method considers also the effect of the negative inductance associated with calibration procedure.
Author
Andrei Vorobiev
Chalmers, Microtechnology and Nanoscience (MC2), Microwave and Terahertz Technology
Dan Kuylenstierna
Chalmers, Microtechnology and Nanoscience (MC2), Microwave and Terahertz Technology
Pär Rundqvist
Chalmers, Microtechnology and Nanoscience (MC2), Microwave and Terahertz Technology
Spartak Gevorgian
Chalmers, Microtechnology and Nanoscience (MC2), Microwave and Terahertz Technology
36th European Microwave Conference, EuMC 2006; Manchester; United Kingdom; 10 September 2006 through 12 September 2006
843-846
2960055160 (ISBN)
Subject Categories
Other Materials Engineering
DOI
10.1109/EUMC.2006.281051
ISBN
2960055160