Broadband microprobe characterization of the ferroelectric films and varactors
Paper in proceedings, 2006

A simple method for the assessment of layout parasitics in the on-wafer microprobe characterization of the ferroelectric films and varactors is presented. The proposed method considers also the effect of the negative inductance associated with calibration procedure.

Author

Andrei Vorobiev

Chalmers, Microtechnology and Nanoscience (MC2), Microwave and Terahertz Technology

Dan Kuylenstierna

Chalmers, Microtechnology and Nanoscience (MC2), Microwave and Terahertz Technology

Pär Rundqvist

Chalmers, Microtechnology and Nanoscience (MC2), Microwave and Terahertz Technology

Spartak Gevorgian

Chalmers, Microtechnology and Nanoscience (MC2), Microwave and Terahertz Technology

36th European Microwave Conference, EuMC 2006; Manchester; United Kingdom; 10 September 2006 through 12 September 2006

843-846

Subject Categories

Other Materials Engineering

DOI

10.1109/EUMC.2006.281051

ISBN

2960055160

More information

Created

10/7/2017