XPS Study of Niobium and Niobium-Nitride Nanofilms
Journal article, 2018
thin films
XPS background
XPS
niobium
depth profiling
niobium nitride
Author
A. Lubenschenko
National Research University Moscow Power Engineering Institute
A Batrakov
National Research University Moscow Power Engineering Institute
I. V. Shurkaeva
National Research University Moscow Power Engineering Institute
Alexey Pavolotskiy
Chalmers, Space, Earth and Environment, Onsala Space Observatory, GARD Technology
Sascha Krause
Chalmers, Space, Earth and Environment, Onsala Space Observatory, GARD Technology
Dmitriy Ivanov
National Research University Moscow Power Engineering Institute
Olga Lubenchenko
National Research University Moscow Power Engineering Institute
Journal of Surface Investigation
1027-4510 (ISSN)
Vol. 12 4 692-700Subject Categories
Other Physics Topics
Other Materials Engineering
Condensed Matter Physics
DOI
10.1134/S1027451018040134