Anisotropic thermal conductivity of vertically self-ordered Nanocrystalline Boron Nitride thin films for thermal hotspot mitigation in electronics
Paper in proceeding, 2018
Thermal-crosstalk has become a prominent issue in modern electronic. Here, we present a new type of vertically-ordered Boron Nitride (voBN) thin films to address such limitation. voBN has a high anisotropic thermal conductivity with 16 times difference between through-plane and in-plane and can be deposited in room temperature. We studied the thermal properties with 3ω method and verified with COMSOL Multiphysics simulations. Such characteristic would allow hotspot density to increase by 295%.
thermal cross talk and anisotropic thermal conductivity
boron nitride thin film
Author
S. H. Tsang
Nanyang Technological University
O. Cometto
Nanyang Technological University
Majid Kabiri Samani
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems
Shuangxi Sun
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems
Johan Liu
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems
Edwin Hang Tong Teo
Nanyang Technological University
2018 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2018 - Proceedings
25-27 8421414
2nd IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2018
Kobe, Japan,
Kobe, Japan,
Subject Categories
Inorganic Chemistry
Other Materials Engineering
Condensed Matter Physics
DOI
10.1109/EDTM.2018.8421414