Anisotropic thermal conductivity of vertically self-ordered Nanocrystalline Boron Nitride thin films for thermal hotspot mitigation in electronics
Paper in proceedings, 2018

Thermal-crosstalk has become a prominent issue in modern electronic. Here, we present a new type of vertically-ordered Boron Nitride (voBN) thin films to address such limitation. voBN has a high anisotropic thermal conductivity with 16 times difference between through-plane and in-plane and can be deposited in room temperature. We studied the thermal properties with 3ω method and verified with COMSOL Multiphysics simulations. Such characteristic would allow hotspot density to increase by 295%.

thermal cross talk and anisotropic thermal conductivity

boron nitride thin film

Author

S. H. Tsang

Nanyang Technological University

O. Cometto

Nanyang Technological University

Majid Kabiri Samani

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Shuangxi Sun

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Johan Liu

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Edwin Hang Tong Teo

Nanyang Technological University

2018 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2018 - Proceedings

25-27 8421414

2nd IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2018
Kobe, Japan,

Subject Categories

Inorganic Chemistry

Other Materials Engineering

Condensed Matter Physics

DOI

10.1109/EDTM.2018.8421414

More information

Latest update

1/17/2019