Chemical Vapor Deposition of Vertically Aligned Carbon Nanotube Arrays: Critical Effects of Oxide Buffer Layers
Journal article, 2019

Vertically aligned carbon nanotubes (VACNTs) were synthesized on different oxide buffer layers using chemical vapor deposition (CVD). The growth of the VACNTs was mainly determined by three factors: the Ostwald ripening of catalyst nanoparticles, subsurface diffusion of Fe, and their activation energy for nucleation and initial growth. The surface roughness of buffer layers largely influenced the diameter and density of catalyst nanoparticles after annealing, which apparently affected the lifetime of the nanoparticles and the thickness of the prepared VACNTs. In addition, the growth of the VACNTs was also affected by the deposition temperature, and the lifetime of the catalyst nanoparticles apparently decreased when the deposition temperature was greater than 600 °C due to their serious Ostwald ripening. Furthermore, in addition to the number of catalyst nanoparticles, the density of the VACNTs was also largely dependent on their activation energy for nucleation and initial growth.

Chemical vapor deposition

Atomic layer deposition

Vertically aligned carbon nanotubes

Oxide buffer layers


Haohao Li

Shanghai University

G. Yuan

Shanghai University

B. Shan

Shanghai University

Xiaoxin Zhang

Shanghai University

Hongping Ma

Fudan University

Yingzhong Tian

Shanghai University

Hongliang Lu

Fudan University

Johan Liu

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Shanghai University

Nanoscale Research Letters

1931-7573 (ISSN) 1556-276X (eISSN)

Vol. 14 106

Subject Categories

Inorganic Chemistry

Materials Chemistry

Other Chemical Engineering



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