Electrochemical etching of AlGaN for the realization of thin-film devices
Journal article, 2019
Lift-off
Thin-film
AlGaN
Electrochemical etching
Author
Michael Alexander Bergmann
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Johannes Enslin
Technische Universität Berlin
Rinat Yapparov
Royal Institute of Technology (KTH)
Filip Hjort
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Björn Wickman
Chalmers, Physics, Chemical Physics
Saulius Marcinkevičius
Royal Institute of Technology (KTH)
Tim Wernicke
Technische Universität Berlin
Michael Kneissl
Technische Universität Berlin
Åsa Haglund
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Applied Physics Letters
0003-6951 (ISSN) 1077-3118 (eISSN)
Vol. 115 18 182103- 182103Areas of Advance
Nanoscience and Nanotechnology
Subject Categories
Other Physics Topics
Nano Technology
Condensed Matter Physics
Infrastructure
Chalmers Materials Analysis Laboratory
Nanofabrication Laboratory
DOI
10.1063/1.5120397