MEMS meander harvester with tungsten proof-mass
Paper in proceeding, 2019
Author
Elof Köhler
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems
Pontus Johannisson
RISE Research Institutes of Sweden
D. Kolev
RISE Research Institutes of Sweden
Fredrik Ohlsson
RISE Research Institutes of Sweden
P. Ågren
Silex Microsystems AB
Jessica Liljeholm
Silex Microsystems AB
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems
Cristina Rusu
RISE Research Institutes of Sweden
Journal of Physics: Conference Series
17426588 (ISSN) 17426596 (eISSN)
Vol. 1407 1 012121Daytona Beach, USA,
Smart MEMs Piezo based energy Harvesting with Integrated Supercapacitor and packaging (Smart-MEMPHIS)
European Commission (EC) (EC/H2020/644378), 2014-12-15 -- 2018-06-14.
Subject Categories
Accelerator Physics and Instrumentation
Other Physics Topics
Other Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1088/1742-6596/1407/1/012121