MEMS meander harvester with tungsten proof-mass
Paper i proceeding, 2019

Using current battery technology the life-time of a leadless pacemaker is approximately 6-10 years, with a large portion of the pacemaker occupied by the battery. This paper investigates the possibility to use a MEMS piezoelectric harvester as a complementary energy source in leadless pacemakers. The challenge is to combine the low resonance frequency required to harvest energy from a heartbeat with the small volume of 20×4×3 mm3 available, with the corresponding harvester displacement restricted to 2 mm. Due to the displacement restriction the selected structure was a double clamped bridge in order to reduce the mass displacement, with various meander-type designs simulated to reduce resonance frequency. To further reduce resonance frequency large proof-masses of tungsten were attached by gluing. Two types of tungsten proof-masses were added to four different harvesters, 16.4 mg and 16.6 mg on sample 1 and 2 and 502 mg and 492 mg proof-mass on sample 3 and 4. The structures have 2 μm patterned PZT (deposited by sol-gel technique) and Pt metal electrodes for d31 mode harvesting. The power output measured from one of the two PZT/electrodes was 0.13 nW with 50 μm deflection at 100 k Ω optimal load resistance and 9.1 mVpp at 232 Hz.


Elof Köhler

Chalmers, Mikroteknologi och nanovetenskap, Elektronikmaterial

Pontus Johannisson

RISE Research Institutes of Sweden

D. Kolev

RISE Research Institutes of Sweden

Fredrik Ohlsson

RISE Research Institutes of Sweden

P. Ågren

Silex Microsystems AB

Jessica Liljeholm

Silex Microsystems AB

Peter Enoksson

Chalmers, Mikroteknologi och nanovetenskap, Elektronikmaterial

Cristina Rusu

RISE Research Institutes of Sweden

Journal of Physics: Conference Series

17426588 (ISSN) 17426596 (eISSN)

Vol. 1407 1 012121

18th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2018
Daytona Beach, USA,

Smart MEMs Piezo based energy Harvesting with Integrated Supercapacitor and packaging (Smart-MEMPHIS)

Europeiska kommissionen (EU) (EC/H2020/644378), 2014-12-15 -- 2018-06-14.


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