Comparison of Thermally Grown Carbon Nanofiber-Based and Reduced Graphene Oxide-Based CMOS-Compatible Microsupercapacitors
Journal article, 2021

Microsupercapacitors as miniature energy storage devices require complementary metal-oxide-semiconductor (CMOS) compatible techniques for electrode deposition to be integrated in wireless sensor network sensor systems. Among several processing techniques, chemical vapor deposition (CVD) and spin coating, present in CMOS manufacturing facilities, are the two most viable processes for electrode growth and deposition, respectively. To make an argument for choosing either of these techniques to fabricate MSCs utilizable for an on-chip power supply, we need a comparative assessment of their electrochemical performance. Herein, the evaluation of MSCs with CVD-grown carbon nanofiber (CNF)-based and spin-coated reduced graphene oxide (rGO)-based electrodes is reported. The devices are compared for their capacitance, energy and power density, charge retention, characteristic frequencies, and ease of fabrication over a large sweep of scan rates, current densities, and frequencies. The rGO-based MSCs demonstrate 112 mu F cm(-2) at 100 mV s(-1) and a power density of 12.8 mW cm(-2). The CNF-based MSCs show 269.7 mu F cm(-2) and 30.8 mW cm(-2). CVD-grown CNF outperforms spin-coated rGO in capacitive storage at low frequencies, whereas the latter is better in terms of charge retention and high-frequency capacitance response.

spin coating

microsupercapacitors

carbon nanofibers

reduced graphene oxide

chemical vapor deposition

CMOS-compatible

Author

Agin Vyas

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Simin Zare Hajibagher

Student at Chalmers

Qi Li

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Mohammad Mazharul Haque

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Anderson David Smith

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Per Lundgren

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Physica Status Solidi (B): Basic Research

0370-1972 (ISSN) 1521-3951 (eISSN)

Vol. 258 2 2000358

Subject Categories

Materials Chemistry

Other Electrical Engineering, Electronic Engineering, Information Engineering

Condensed Matter Physics

DOI

10.1002/pssb.202000358

More information

Latest update

3/24/2021